Performance characterization of a bulk micromachined gyroscope working at atmosphere
A bulk micromachined gyroscope fabricated with an improved process flow is measured systematically. It achieves good performance at atmosphere. The driving resonant frequency is 1663.5Hz with a quality factor 195, and the sensing resonant frequency is 1677Hz with a quality factor 200. The R2-nonlinearity is 0.008％ within the range of ±43°/s, which is limited by the digital to analogue converter, with a scale factor of 42.17mV/°/s. The scale factor is reduced to 7.4mV/°/s to perform linear test within a larger range, and the R2-nonlinearity is 0.032％ within ±200°/s. The bias stability is 19.55°/h and the measured noise floor is 0.0125°/s/√Hz at 1Hz.
Xia Zhang Xu-dong Zheng Shi-chang Hu Hao Wang Zhong-he Jin
Department of Information Science and Electronic Engineering,Zhejiang University. Department of Information Science and Electronic Engineering,Zhejiang University before August 30,20
国际会议
哈尔滨
英文
1245-1248
2010-01-08（万方平台首次上网日期，不代表论文的发表时间）