Flexible In-plane Photonic Devices Based on Transferrable Si Nanomembranes on Polyimide Film
The flexible electronics and photonics have attracted a lot of attentions in past decade because of their potentially wide applications. A general method to fabricate nanomembrane flexible device involves two steps. At first, a nanomembrane on top of a sacrificial layer is patterned. Then, the nanomembrane is freed by high selective etching of the sacrificial layer and then weakly bonds to the handle substrate by Vander Waals forces. Later on, the released devices are transferred to the target flexible substrates. Notable successes include paperlike display, flexible silicon integrated circuits, photonic crystal filter and sensor skins, and so on. However, the progress in flexible photonic device is still limited to surface-normal devices such as photonic crystal filter. This type of devices usually has a large area and/or same dimensions which makes the transfer much easier than in-plane photonic device. This paper reports the transfer of in-plane Silicon nanomembrane photonic devices on polyimide flexible film. Employing a slightly modified transfer process, passive optical components, such as optical waveguide and multimode multimode interferometer, are successfully transferred on to Kapton polyimide film.
Xiaochuan Xu Harish Subbaraman Daniel T. Pham Amir Hosseini Afshin Ghaffari Ray T. Chen
Microelectronics Research Center, Electrical and Computer Engineering Department, the University of Omega Optics, Inc. 10306 Sausalito Dr. Austin, TX 78759
国际会议
3rd International Photonics & OptoElectronics Meetings(第三届国际光子与光电子学会议 POEM 2010)
武汉
英文
1-6
2010-11-03（万方平台首次上网日期，不代表论文的发表时间）