Fabrication of 1x3 Multimode Interference based Beam Splitter on Silicon Nanomembrane

摘要：

We present a 1×3 mukimode interference based beam splitter on silicon-on-insulator wafer with very thin silicon layer. The device exhibits low cross-talk and high uniformity at 1550nm wavelength.

作者: Y Zhang D Kwong A Hosseini R T Chen

作者单位: Microelectronics Research Center, Department of Electrical and Computer Engineering, the University of Texas at Austin, Austin, TX 78758, USA

会议类型: 国际会议

会议名称: 3rd International Photonics & OptoElectronics Meetings(第三届国际光子与光电子学会议 POEM 2010)

会议地点: 武汉

会议语种:英文

页码: 1-6

在线出版日期: 2010-11-03（万方平台首次上网日期，不代表论文的发表时间）