3-5μm F-P Tunable Filter Array based on MEMS technology
In this paper the design, fabrication and test of a MEMS F-P tunable filter operating in 3-5um range is presented. The initial design of micro-bridge structure was achieved through COMSOL simulation software. In the simulation, the micro-bridge could achieve a displacement of 0.6um under very low applied voltage of 30V, while still preserving good mirror parallelism. By using surface micromachining techniques, a 200×200 array of F-P tunable micro-bridge was fabricated. SEM photographs of the fabricated device and method of optical performance test are also introduced. This MEMS F-P tunable filter can be a potential application in spectroscopic sensing and optical communication system.
Wei Xu Si-hai Chen Shi-wei Bao Yi-fan Zhou Sang-zhi Zhao Qing-hua Meng Huan Luo
College of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wu College of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wu Guangxi Normal University, Guilin541002, China
国际会议
3rd International Photonics & OptoElectronics Meetings(第三届国际光子与光电子学会议 POEM 2010)
武汉
英文
1-6
2010-11-03（万方平台首次上网日期，不代表论文的发表时间）