Study on the structure of bridge surface of the micro Fabry-Perot cavity tunable filter
Micro Fabry-Perot cavity tunable filters are widely applied in the area of Pushbroom Hyperspectral imaging, DWDM optical communication system and selfadaptive optics. With small volume, lower consumption and cost, the Micro Fabry-Perot cavity tunable filter can realize superior response speed, large spectral range, high definition and high reliability. By deposition metal membrane on silicon chip by MEMS technology, the micro Fabry-Perot cavity has been achieved, which is actuated by electrostatic force and can realize the function of an optical filter. In this paper, the micro-bridge structure of the micro Fabry-Perot cavity tunable filter has been studied. Finite element analysis software COMSOL Multiphysics has been adopted to design the structure of the micro-bridge of the micro filter. In order to simulate the working mechanism of the micro FabryPerot cavity and study the electrical and mechanical characteristics of the micro tunable filter, the static and dynamic characteriastics are analyzed, such as stress, displacement, transient response, etc. The corresponding parameters of the structure are considered as well by optimizition the filters sustain structure.
MEMS tunable filter arrays FEA analysis structure optimize
Qinghua Meng Huan Luo Shiwei Bao Yifan Zhou Sihai Cheu
College of Physics and Electronic Engineering, Guangxi Teachers Education University, Nanning, 53002 College of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wu
国际会议
3rd International Photonics & OptoElectronics Meetings(第三届国际光子与光电子学会议 POEM 2010)
武汉
英文
1-8
2010-11-03（万方平台首次上网日期，不代表论文的发表时间）