A Single-Fundamental-Mode Photonic Crystal Vertical Cavity Surface Emitting Laser with Seven-point Defect
A single-fundamental-mode photonic crystal (PhC) vertical cavity surface emitting laser (VCSEL) with seven-point defect was fabricated by etching twodimensional PhC on surface of the VCSELs top distributed Bragg-reflector (DBR). The PhC was fabricated using electron beam lithography (EBL) and inductive coupled plasma reactive ion etching (ICPRIE). The single-fundamental-mode performances were investigated and demonstrated. The device with output power 0.7mW under continuous-wave (CW) operate, half maximum of the lasing spectrum less than 0.06nm, far field divergence angle less than 10° and side mode suppression ratio over 35dB was obtained. The characteristics of the PhC VCSEL operating at pulse condition are compared with VCSEL with the similar aperture size, we found that the output power of PhC VCSEL increased more than conventional VCSEL with the impulse duty factor decreased, corresponding to 100％ and 32％, respectively.
ZHOU Kang XU Chen XIE Yi-Yang ZHAO Zhen-Bo Liu-Fa LIU Ying-Ming Wang Bao-Qiang SHEN Guang-Di
Key Laboratory of Opto-electronics Technology (Beijing University of Technology),Ministry of Educati Key Laboratory of pto-electronics Technology (Beijing University of Technology),Ministry of Educatio
国际会议
3rd International Photonics & OptoElectronics Meetings(第三届国际光子与光电子学会议 POEM 2010)
武汉
英文
1-5
2010-11-03（万方平台首次上网日期，不代表论文的发表时间）