MEMS integrated narrow band infrared emitter and detector for infrared gas sensor

摘要：

With the development of microfabrication technology, compact, lightweight, inexpensive and portable microspectrum detection and analyzing products are expected to be extensively applied in the future commercially. From the viewpoint of power consumption and compact volume, integration of various components on one substrate is desirable. In this work, integrated infrared gas sensor with micro infrared emitter and detector elements based on MEMS technology are developed. The integrated suspended infrared emitter and infrared micobolometers are designed and fabricated on a silicon substrate.

作者: J J Lai H F Liang Z L Peng X Yi X F Zhai

作者单位: Wuhan National Laboratory for Optoelectronics, Wuhan 430074, P.R.China

会议类型: 国际会议

会议名称: 3rd International Photonics & OptoElectronics Meetings(第三届国际光子与光电子学会议 POEM 2010)

会议地点: 武汉

会议语种:英文

页码: 1-4

在线出版日期: 2010-11-03（万方平台首次上网日期，不代表论文的发表时间）