A Microrobotic Insect Design based on SU-8 and Polyimide Materials

摘要：

Micro elettro mechanical systems (MEMS) technology is a combination of micro-electronics and technology micro-mechanical technology, which provides a possibility for successful flight of (he microrobotic insect because (he light micro structures and vehicle can be fabricated by this technology. This paper proposes a structural design and manufacture method of a microrobotic insect based on SU-8 photoresist and Polyimide Material by MEMS technology, and also (he structural is SU-8 photoresist, which provides a good way for the design and fabrication of Flapping-wing Micro Air Vehicle.

关键词： microrobotic insect flying robot SU-8 and Polyimide MEMS process

作者: Pengcheng Chi Weiping Zhang Kun Meng Wenyuan Chen Wu Liu Feng Cui Xiaosheng Wu Hongyi Li

作者单位: Key Laboratory for Thin Film and Micro fabrication of Ministry of Education, Narionai Key Laboratory State Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Sheny

会议类型: 国际会议

会议名称: 2010 International Conference on Information Security and Artificial Intelligence(2010年信息安全与人工智能国际会议 ISAI 2010)

会议地点: 成都

会议语种:英文

页码: 709-713

在线出版日期: 2010-12-17（万方平台首次上网日期，不代表论文的发表时间）