Research on the Measurement Technology of Microarea Sheet Resistance Based on Image Recognition with Inclined Square Four Point Probes

摘要：

This article introduces how to determine the probes position by means of pattern recognition technology about the micro area in testing system of square four point probes inclined. Then the stepper motor is controlled and square structure position of four point probes is determined automatically. Thus the tests accuracy is guaranteed and the influence of results tested by the structure of probes is elaborated preliminary. The test method has been verified through experiment data.

关键词： component Square four point probes inclined Pattern recognition Sheet resistance

作者: Xinfu Liu Hongyi Liu Runli Zhang

作者单位: School of Mechanical Engineering, Hebei University of Technology, Tianjin, China School of Instrument Science and Technology, Southeast University, Nanjing, China

会议类型: 国际会议

会议名称: 2010 International Conference on Information Security and Artificial Intelligence(2010年信息安全与人工智能国际会议 ISAI 2010)

会议地点: 成都

会议语种:英文

页码: 1211-1214

在线出版日期: 2010-12-17（万方平台首次上网日期，不代表论文的发表时间）