Thermal Stability of CrAlN Coatings
Cr-Al-N coatings were deposited on the surface of the (111) single silicon for the aim to study the thermal stability of this kind of coating. The microstructure and composition of the coatings were identified by XRD and SEM/EDS,respectively. The changes of the microstructure of the coatings after being annealing in the hydrogen under 900-1100℃ were also studied by XRD analysis. The results showed that: the as-deposited coatings performed Bl microstructure with (111) preferred orientation; the microstructure of the Cr-Al-N coatings would transformed from CrN to Cr2N during the increasing of temperature and the transformation temperature increased with increasing aluminum content of the coating; AlN would also precipitate from the Cr-Al-N coating and the precipitation temperature decreased with increasing aluminum content of the coating.
Cr-Al-N coatings Thermal stability Magnetron sputtering
Zhu Ming Li Meishuan
College of Material Science and Engineering,Xian University of Science and Technology,Xian 710054, Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China
国际会议
Frist Annual Meeting on Testing and Evaluation of Inorganic Materials(第一届全国无机材料测试与评价学术年会)
南昌
英文
249-252
2010-04-28（万方平台首次上网日期，不代表论文的发表时间）