Structural and Optical Properties of 6H-SiC Helium and Oxygen Implanted at 700 K
Raman scattering spectroscopy,ultraviolet and visible absorption spectroscopy and Rutherford backscattering spectrometry were employed to analyze the annealing behavior of defects and the optimistic effect of cavities to oxygen. It was found that the cavities had strong getting effect to oxygen and captured its neighboring implanted oxygen atom, and enhanced the formation of SixOy compound, thus helped shaping the buried oxide in a well defined region. In addition,it also minished the damage level in lattice. The interface between damage layer and crystalline layer was estimated to be 198 nm below surface of 6H-SiC. The implanted oxygen was pegged in the compressed and serried cavity layer, making the amorphous layer narrower than that of reference samples.
6H-SiC Raman UV RBS-C
H.H. Zhang W.M. Gao Y.L. Shen B.S.Li
Jiangxi Key Laboratory of Surface and Engineering,Jiangxi Science and Technology Normal University,N Jiangxi Key Laboratory of Surface and Engineering,Jiangxi Science and Technology Normal University,N Institute of Modern Physics,Chinese Academy of Sciences,Lanzhou 730000,China
国际会议
Frist Annual Meeting on Testing and Evaluation of Inorganic Materials(第一届全国无机材料测试与评价学术年会)
南昌
英文
287-292
2010-04-28（万方平台首次上网日期，不代表论文的发表时间）