Novel Touch Mode Capacitive Pressure Sensor Based On SiC

摘要：

The advantages of touch mode of operation are near linear output, large over-range pressure and robust structure. And Silicon Carbide (SiC) is a promising material for the device operating in harsh environments. In this paper, a novel touch mode pressure sensor based on SiC is presented, and the process is illustrated detailedly. Based on the calculation and Finite Element Analysis, the structure parameters of the sensor are designed detailedly.

关键词： capacitive pressure sensor touch mode PECVD SiC

作者: Li Minghui Deng Jiahao Gao Shiqiao

作者单位: School of Aerospace Science and Engineering,Beijing Institute of Technology,Beijing 100081,China

会议类型: 国际会议

会议名称: 2011 10th International Conference on Electronic Measurement & Instruments(第十届电子测量与仪器国际会议 ICEMI2011)

会议地点: 成都

会议语种:英文

页码: 333-335

在线出版日期: 2011-08-16（万方平台首次上网日期，不代表论文的发表时间）