Research on Amplitude Calibration of High Pulse Current Source for Semiconductor Device Test System

摘要：

Pulse Test Method is widely used in semiconductor devices testing. As pulse signal is mostly periodic transient narrow pulse (e.g. pulse duration of 300μs) with higher specification, common DMM and digital oscilloscope can hardly fulfill accurately measurement of pulse signals for its sampling rate and measurement accuracy limitations. This will directly affect failure analysis and quality control aspects of semiconductor devices. National Instruments PXI-4071 Flex DMM, Visual C + + 6.0 and self-developed test adapters was used to constitute test platform in this article. Setting trigger, data acquisition and analyzing of measurement results can be fulfilled by software.. Accurately measurement of pulse currents’ amplitude of semiconductor device test system was realized.

关键词： Pulse Signal Trigger Data Acquisition Amplitude.

作者: Liu Chong Yu Lihong Xiang Daocai

作者单位: MIIT Metrology Center,China Electronics Standardization Institute

会议类型: 国际会议

会议名称: 2011 10th International Conference on Electronic Measurement & Instruments(第十届电子测量与仪器国际会议 ICEMI2011)

会议地点: 成都

会议语种:英文

页码: 581-584

在线出版日期: 2011-08-16（万方平台首次上网日期，不代表论文的发表时间）