The Reliability Model of Micro-electromechanical System Based on Fracture Mechanism

摘要：

Fracture failure is one of the main failure modes of Micro-electromechanical system (MEMS). Based on studying MEMSs fracture failure mechanism, the reliability models for MEMS fracture failure under mechanical stress field,electrostatic field, and alternating electric field are built with mechanical reliability methods. The model building process is shown by an application case. These models supply some references to engineers who do reliability design and analysis of MEMS.

关键词： MS eliabilit Model racture Mechanism

作者: Chunhua Yang Qin Liu Tao Li

作者单位: The North System of Engineer Institute Beijing, 100089, China

会议类型: 国际会议

会议名称: 2011 9th International Conference on Reliability,Maintainability and Safety(第九届国际可靠性、维修性、安全性会议 ICRMS2011)

会议地点: 贵阳

会议语种:英文

页码: 378-382

在线出版日期: 2011-06-12（万方平台首次上网日期，不代表论文的发表时间）