Hybrid Particle Swarm Algorithm for Sloving Batch Scheduling Problem of Semiconductor Furnace

摘要：

Hybrid particle swarm algorithm is presented to solve the batch scheduling problem of semiconductor furnace. Firstly, this article introduces the batch scheduling problem of semiconductor furnace. Then, concerning about the situation that the arrival time of wafer batch is uncertain but can be predicted, how to carry on the batch scheduling of semiconductor furnace is analyzed and solved. Finally, the conclusion is obtained by the analysis of simulation results.

关键词： the semiconductor furnace batch scheduling hybrid particle swarm algorithm

作者: Fengshan Pan Chunming Ye Xiaohua Sheng

作者单位: Business School, University of Shanghai for Science and Technology, Shanghai, China

会议类型: 国际会议

会议名称: The Institute Industrial Engineera Asian Conference 2011(2011年国际工业工程师协会亚洲会议)

会议地点: 上海

会议语种:英文

页码: 395-402

在线出版日期: 2011-06-10（万方平台首次上网日期，不代表论文的发表时间）