Simulation and Analysis for the Cooling System of Circular Planar Magnetron Sputtering Target
The surface temperature of magnetron sputtering target will affect the sputtering rate and power density,therefore,the cooling system of the target is very important. This paper simulated the convection heat transfer of the target surface of SD500 magnetron sputtering coater and found that the cooling water temperature between the import and export,the temperature distribution of target surface,state of the cooling water flow in the target all met the theoretical value and the actual measured value. Because of the vortex in the target and the cooling water is not completely contact with the copper backplane,the cooling of the etching area on the target surface is uneven. The temperature increases by degrees with wavy on both sides of the targets-eye from the entrance to exit of the cooling water. In addition,it demonstrated that FLUENT software can be used in the simulation and optimization of magnetron target cooling system,and laid the foundation for subsequent research staff.
Magnetron sputtering target FLUENT software Simulate Water-cooling
ZHANG Yi-chen WANG De-zhi
Vacuum and Fluid Engineering Research Institute,Northeastern University,Shenyang 110004,China
国际会议
沈阳
英文
105-110
2011-05-22（万方平台首次上网日期，不代表论文的发表时间）