Corrosion Resistance Improvements of Cast Iron Rotors in Dry Vacuum Pump by Sputtering Cr Coatings
Since corrosion resistance is vital to evaluate the quality of multistage dry vacuum pumps,a new method of depositing Cr thin film on the rotors is investigated to improve the anti-erosion performance. DC magnetron sputtering coating machine is used to deposit Cr thin film layers on the rotors surface. The preparation process is studied varying the parameters such as vacuum degree,gas flow rate and deposition time. After surface characterizations and salt spray tests,the results show that corrosion resistance of the samples has been remarkably enhanced and coating Cr thin film is an effective way to improve corrosion resistance. Other features such as thickness,hardness,surface morphology,and roughness are also improved.
Vacuum pump Cr coatings corrosion resistance magnetron sputtering salt spray test
LIU Kun WANG Guang-yu BA De-chun ZHANG Zhen-hou DU Guang-yu
School of Mechanical Engineering and Automation,Northeastern University,Shenyang,China,110004 SKY Technology Development Company Ltd. of CAS,Shenyang,China,110168
国际会议
沈阳
英文
124-130
2011-05-22（万方平台首次上网日期，不代表论文的发表时间）