Preparation of tungsten disulfide thin films by radio-frequency magnetron sputtering on stainless steel and its tribological properties
Tungsten disulfide thin film was prepared on 3Crl3 martensitic stainless steel using radio-frequency sputtering. Different technical parameters including sputtering power,pressure and deposition time were employed to obtain different films. The films then were investigated by X-ray diffraction,scanning electron microscope for phase analysis,surface topography and chemical composition. The binding force and friction coefficient of tungsten disulfide film was also tested. The results showed that non-crystalline tungsten disulfide thin film had been obtained with a typical sulfur/tungsten ratio below 2. It was also found that the sulfur/tungsten ratio was significantly affected by the variation of the technical parameters. The friction coefficient of the films was inversely proportional to the sulfur/tungsten ratio in a certain range. However,the technical parameters didnt appear to have obvious effects on the binding force of the film.
tungsten disulfide radio-frequency sputtering sputtering technology chemical constitution friction coefficient
TAN Zhen DU Guang-yu LIU Kun BA De-chun
Northeastern University Shenyang 110004 China ShenYang Radio and TV University Shenyang 110004 China Northeastern University Shenyang 110004 China
国际会议
沈阳
英文
131-137
2011-05-22（万方平台首次上网日期，不代表论文的发表时间）