Virtual Prototype Design of Vacuum Coating Machine

摘要：

This paper applies the virtual prototyping technology to the design of the vacuum coating machine in order to solve the traditional design problems such as long designing cycle and high designing cost. In this research we take the magnetron sputtering coating machine for example and structure a magnetron sputtering coating machine framework to achieve the virtual prototype designs distributed collaborating simulation basing on the models of the whole lifecycle including mechanical designing,processing,assembling,testing,operation and maintenance. The framework provides a theoretical basis for the virtual prototype design of magnetron sputtering coating machines. On this basis,the solid models of typical magnetron sputtering coating machines virtual prototype design have been created though the established framework and its function was simulated too. This clear example demonstrated the feasibility of vacuum coating machines virtual prototype design.

关键词： virtual prototype simulation modeling magnetron sputtering

作者: ZHANG Yi-chen LI Can-lun SUN Zu-lai ZHANG Cheng-li

作者单位: Northeastern University,Shenyang, Shenyang 110004,China ShenYang Vacuum Technology Institute, Shenyang 110042,China

会议类型: 国际会议

会议名称: 10th International Conference on Vacuum Metallurgy and Surface Engineering,Vacuum Engineering Conference 2011 and Vacuum Consultancy Workshop 2011(第十届国际真空冶金与表面工程学术会议、2011年真空工程学术会议、2011年真空咨询工作会议)

会议地点: 沈阳

会议语种:英文

页码: 188-194

在线出版日期: 2011-05-22（万方平台首次上网日期，不代表论文的发表时间）