Study on Influence Factors to Workpiece Temperature in Multi-arc Ion Plating
Workpiece temperature is a very important influence factor to TiN film quality in multi-arc ion plating process. In order to predict the workpiece temperature in plating process,the influence factors to workpiece temperature was discussed from the aspect of energy. According to conservation of energy,an equation between workpiece temperature and bias voltage,current,workpiece gross,workpiece material,heater power,and emission ratio of thermal baffle was established. The equation was solved with Mathematica and Matlab software,and the variation of workpiece temperature at different operational parameters was obtained. The comparison results of calculated values and measured values showed that the equation could provide certain references for the selection of operational parameters in practical production process.
multi-arc ion plating workpiece temperature influence factors conservation of energy
XIE Yuan-hua HE Zhan-min HAN Jin ZHU Tong XU Cheng-hai
School of Mechanical Engineering and Automation School of Material and Metallurgy,Northeastern University,Shenyang 110004,China
国际会议
沈阳
英文
269-275
2011-05-22（万方平台首次上网日期，不代表论文的发表时间）