Research,Development and Industrialization of Dry Vacuum Pumps Applied in Generalized Semiconductor Industry
Generalized semiconductor industry includes semiconductor manufacturing,solar photovoltaic,liquid crystal injection,flat panel display and so on. With the development of generalized semiconductor industry recently,dry pumps get a good opportunity to develop. The application of dry pumps is more and more wide,and extracting process is more complex,needs to satisfy more requirements. At the same time,as one of the core equipments,we pay more attention to the development and production of vacuum pumps.In this paper based on the application process of the semiconductor industry we require the vacuum pump to work at high-temperature,long-term stable operation,low noise,easy maintenance,free of oil and so on. At the same time,we also require the pump to save energy,resist corrosion,anti-leak and so on. We introduce the new technologies and new means in the development and applications of dry vacuum pumps ,which significantly increase the level of design and manufacture of domestic vacuum pumps,and has made a qualitative leap. Some domestic dry pumps is not worse than the similar foreign products in the performance. Domestic dry pumps are gradually occupying and expanding the market. Finally,we discuss the future direction of the dry pump in the development and industrial applications.
generalized semiconductor industry dry vacuum pumps development research
ZHANG Zhen-hou BA De-chun WANG Guang-yu LIU Kun YUE Xiang-ji
SKY Technology Development Company Ltd. of CAS,Shenyang,China,110168 School of Mechanical Engineering and Automation,Northeastern University,Shenyang,China,110004
国际会议
沈阳
英文
285-292
2011-05-22（万方平台首次上网日期，不代表论文的发表时间）