Experimental Research on the Back-streaming Rate of Oil Diffusion Pump
Oil diffusion pump is an equipment for acquisition of high vacuum,and widely used in electronic,metallurgical,mechanical and atomic energy industries and space technology domain,because of its no mechanical moving parts,simple structure,easy maintenance,long life and much lower price than that of other high vacuum pumps. The back-streaming of oil diffusion pump to vacuum chamber would pollute vacuum environment,and the using of oil diffusion pump has be limited in clean vacuum equipments,In order to deeply research the performance about oil diffusion pump,present study analyses and discusses the reasons of oil vapor back-streaming of oil diffusion pump,and successfully improved the construction of a SFD-28 oil diffusion pump,and tested the oil vapor backstreaming rate. The experimental results show that the pumps low back-streaming rate reached the leading level of same type of products.
oil diffusion pump back-streaming construction improvement back-streaming rate testing
WANG Xiao-dong LI Wei LEI Hong-jian
Vacuum and Fluid Research Centre,School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China
国际会议
沈阳
英文
298-300
2011-05-22（万方平台首次上网日期，不代表论文的发表时间）