The error of DL-6A Resistance Vacuum Gauge

摘要：

This paper presents the error of resistance (Pirani ) vacuum gauge. The measurement range of mis kind of vacuum gauge is 10-10~5Pa. When the vacuum degree is in the range of (10-5)?03Pa,the error is about 10％. However,provided that the vacuum degree is less than l0Pa or more than 5003Pa,the error can reach to 35％.

作者: WANG Xun

作者单位: Department of Electronics,Peking University,Beijing,100871

会议类型: 国际会议

会议名称: 10th International Conference on Vacuum Metallurgy and Surface Engineering,Vacuum Engineering Conference 2011 and Vacuum Consultancy Workshop 2011(第十届国际真空冶金与表面工程学术会议、2011年真空工程学术会议、2011年真空咨询工作会议)

会议地点: 沈阳

会议语种:英文

页码: 385-388

在线出版日期: 2011-05-22（万方平台首次上网日期，不代表论文的发表时间）