A novel Atomic Force Microscope control system based on PC104 and DSP Embedded system

摘要：

In order to achieve large scanning range, this article presents a new type high-speed AFM system. According to the need of rapid data transmission and operation, the AFM control system structure was composed of PC104 and DSP hardware model. Because of using a large displacement flexure stage as the sample stage, this AFM system is capable of providing a scan range of 100×100um image with 50Hz line-scan speed. The capacitor displacement sensors are used as x-y position during AFM scan image. We realized a new scanning method based on positioning control. The scanning images are more precision and less distortion than general open-loop x-y scanning image.

关键词： AFM PC104 DSP Sinusoidal wave High speed scanning

作者: Bohua Yin Daixie Chen Yunsheng Lin Mingzhang Chu Li Han

作者单位: Department of Micro-nano Fabrication Technology Institute of Electrical Engineering, CAS Beijing 100190, China

会议类型: 国际会议

会议名称: 2010 International Conference on Circuit and Signal Processing(2010年电路与信号处理国际会议 ICCSP 2010)

会议地点: 上海

会议语种:英文

页码: 65-67

在线出版日期: 2010-12-25（万方平台首次上网日期，不代表论文的发表时间）