The design and micromachining of SU-8 flapping wing Micro air vehicle

摘要：

This article presents the design of the flapping wing Micro air vehicle based on the further study of biological insects, imitating the mechanics of insect flight, using simple mechanism and electromagnetic actuator to achieve the bionic air vehicles. Based on the whole structure including thorax, tergum and wings, we designed the wings structure and the basic sizes, and used ANSYS for static analysis, verifying the feasibility of selected SU-8 materials. With a new micromachining process, we acquired 25mm wingspan Micro air vehicle.

关键词： MEMS Flapping wing Micro air vehicle(FMAV) Micromachining electromagnetic actuator SU-8

作者: Kun Meng Weiping Zhang Wenyuan Chen Pengcheng Chi Feng Cui Wu Liu Xiaosheng Wu Hongyi Li

作者单位: Key Laboratory for Thin Film and Microfabrication of Ministry of Education, National Key Laboratory State Key Laboratory of Robotics Shenyang Institute of Automation, Chinese Academy of Sciences Sheny

会议类型: 国际会议

会议名称: 2010 International Conference on Circuit and Signal Processing(2010年电路与信号处理国际会议 ICCSP 2010)

会议地点: 上海

会议语种:英文

页码: 584-587

在线出版日期: 2010-12-25（万方平台首次上网日期，不代表论文的发表时间）