Study of micro vibration inflence on Scanning Tunneling Microscopy
Scanning tunneling microscopy is easily affected by the micro vibration.The influence of vibration has already become one of main obstacles for improving the nano measurement accuracy.The technique of antivibration,vibration isolation and vibration compensation turns into a new branch in nano measurement field.Starting with the research of vibration sensitivity of scanning tunneling microscopy,the title is primary to study the theory and methods of nano vibration sensor based on the tunneling effect.And then,we have developed the experimental device and made experiments of vibration detection.The experiment results show that vibration sensor based on tunnel effect has high sensitivity,good frequency characteristic and the same vibratory response characteristic consistent with scanning tunneling microscopy.
vibration detection tunneling effect sensor frequency
Li Mengchao Zheng Lifen
Northeastern University at Qinhuangdao Qin huangdao,China Patent Examination Cooperation center of SPIO Beijing,China
国际会议
秦皇岛
英文
201-202
2010-11-05（万方平台首次上网日期，不代表论文的发表时间）