Study of Double Micro-Displacement Stages for Scanning Tunneling Microscopy

摘要：

Scanning tunneling microscopy is a nano measuring instrument,and it is easily affected by the micro vibration.Now the new anti-vibration and vibration compensation is a new branch to improve the measurement accuracy.In this article,a new design of double micro-displacement stages is brought forward to study the scanning tunneling microscopy.The nano measurement machine and s303 are used to build up the displacement stage.Both stages have the nano level displacement and resolution.Stable performance of the scanning tunneling microscopy has been confirmed through nano experiments.

关键词： vibration compensation nano measuring machine micro-displacement

作者: Li Mengchao Zheng Lifen

作者单位: Northeastern University at Qinhuangdao Qin huangdao,China Patent Examination Cooperation center of SPIO Beijing,China

会议类型: 国际会议

会议名称: 2010 4th International Conference on Intelligent Information Techonlogy Application(第四届智能信息技术应用国际学术研讨会 IITA 2010)

会议地点: 秦皇岛

会议语种:英文

页码: 203-205

在线出版日期: 2010-11-05（万方平台首次上网日期，不代表论文的发表时间）