Design and Analyse of a Novel Surface Silicon Micro Electrostatic Actuator for Static and Dynamic Test

摘要：

A novel type of micro driver was developed to improve the mechanical performance of traditional micro resonators. Micro drivers could be designed to make contradistinctive studies on the static performances and dynamic ones. Its size was limited to 700μm× 700μm×2μm. And the surface-silicon-technology was adapted. Mechanical modeling was developed, and the results were compared with those of the ANSYS. The methods were given to calculate the lateral displacement, spring coefficient and resonant frequency.

关键词： micro electro-static actuator static parameter test dynamic parameter measurement

作者: Jiangming ZHAO Jiangtao ZHAO Guoyan ZHENG Yanping ZHENG

作者单位: School of Mechanical Engineering Zhengzhou University Zhengzhou China School of Education Zhengzhou University Zhengzhou China Henan Electric Power Industrial School Zhengzhou China School of Mechanical Engineering Zhengzhou University Zhengzhou China

会议类型: 国际会议

会议名称: 2010 4th International Conference on Intelligent Information Techonlogy Application(第四届智能信息技术应用国际学术研讨会 IITA 2010)

会议地点: 秦皇岛

会议语种:英文

页码: 132-136

在线出版日期: 2010-11-05（万方平台首次上网日期，不代表论文的发表时间）