A new method of measuring lead screw with dual-frequency laser interference
A new optical structure of measuring lead screw with dual-frequency laser interferometer is proposed, and a formula used quickly correcting Abbe error is deduced in this paper. In the process of testing lead screw, Abbe error in the measured data can be real time compensated, so that the measurement system which doesnt meet Abbe principle can achieve high measurement accuracy. In addition, this method can also eliminate measurement error induced by axial movement of the measured lead screw. The experimental result shows that of the maximum residual error is only 0.48pm within 300mm stroke after the maximum Abbe error 1.39μm is corrected. This method effectively improves the measurement accuracy of lead screw.
ruling engine lead screw dual-frequency laser interferometer Abbe error
Xiang-dong QI Hai-li YU
Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences Changchun,13003 Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences Changchun,13003
国际会议
长春
英文
142-144
2010-08-24（万方平台首次上网日期，不代表论文的发表时间）