Study of Thermal Source and Thermal Partition Models by ELID Grinding on SiC Single Crystals
SiC single crystals is widely used in semiconductor and other areas because of its good physical and mechanical characterstics. However, SiC is a high hardness and brittle material, it is difficult to form the fine surface.Especially the temperature in grinding zone has great influence on it. To improve the grinding performance of SiC single crystals ,it is very significant to analyze the temperature distribution in grinding zone and research how to lower the grinding temperature effectively.In the paper ,according feature of SiC single crystals and the ELID grinding, mechanism of the ELID grinding is analyzed and thermal source and thermal partition models on ELID grinding among work-piece, grinding wheel and electrolyte are established and numerical calculation is carried on .
SiC single crystals thermal source thermal partition
Qiang Xiao Yan Li
School of Mechanical Instrumental Engineering, Xian University of Technology, Xian 710048, China S School of Mechanical Instrumental Engineering, Xian University of Technology, Xian 710048, China
国际会议
The Third International Conference on Modelling and Simulation(第三届国际建模、计算、仿真、优化及其应用学术会议 ICMS 2010)
无锡
英文
436-439
2010-06-04（万方平台首次上网日期，不代表论文的发表时间）