An Experimental Study on the Kerf Characteristics of Silicon Cut with Micro Abrasive Air Jet
Micro abrasive air jet (MAAJ) cutting technology is being increasingly used in the precision machining of hard and brittle materials, due to its distinct advantages of negligible heat effect zone and small cutting force. In this paper, an experimental study on the kerf characteristics, especially for the effect of cutting parameters on the top edge definition, is presented. It shows that the top kerf edge is straight but not sharp. The top edge definition of the kerf improves with a decrease in the air pressure, while the effect of abrasive flow rate and nozzle traverse speed are hardly discernible. The optimum jet incidence angle for highest top edge definition of the kerf is 60°. The results of this paper may be useful for the cutting parameters optimization in the precision three-dimensional micro-structural machining.
Micro abrasive air jet Cutting Kerf characteristics Top kerf edge definition
Q.L.Li C.Z.Huang J.Wang H.T.Zhu Z.W.Liu
School of Mechanical Engineering, Beijing Technology and Business University,Beijing 100037, China Center for Advanced Jet Engineering Technologies (CaJET), Key Laboratory of High Efficiency and Clea School of Mechanical and Manufacturing Engineering, The University of New South Wales,Sydney NSW2052
国际会议
广州
英文
13-17
2010-11-05（万方平台首次上网日期，不代表论文的发表时间）