Fabrication of Micro Aspheric Mould Integrated Ultra-precision Grinding and Magnetorheological Finishing

摘要：

This paper deals with one-point parallel grinding and magnetorheological finishing (MRF) polishing of micro glass lens mould. Firstly,the analysis and experiment of one-point parallel grinding are conducted on micro-aspheric mould with 10mm in diameter, after grinding,the results show that the form accuracy of the micro aspheric mould are 2.538 μm in PVand 0.645 μm in RMS, also the subsurface damages and residual grinding marks are left;And then, the magnetorheological finishing experiment is counducted, the form accuracy achieves 0.892 μm in PV and 0.287 μm in RMS,after finishing, the surface quality was improved.

关键词： Micro-lens mould Parallel grinding method Magnetorheological finishing

作者: Shaohui Yin Hengning Tang Jianwu Yu Kun Tang Fengjun Chen Zhiqiang Xu Jianbo He

作者单位: National Engineering Research Center for High Efficiency Grinding, Hunan University,Changsha 410082, P.R.China

会议类型: 国际会议

会议名称: International Conference on Surface Finishing Technology & Surface Engineering(2010年中国国际光整加工技术学术会议 ICSFT 2010)

会议地点: 广州

会议语种:英文

页码: 134-138

在线出版日期: 2010-11-05（万方平台首次上网日期，不代表论文的发表时间）