The Design and Finite Element Analysis of a Compliant 3-DOF Spatial Translational Ultra-precise Positioning Platform
Ultra-precise positioning platform plays a significant role in ultra-precise operation and micro-operation. A new compliant 3-DOF spatial translational ultra-precise positioning platform is proposed and it overcomes the shortcomings of the general conventional drive and transmission such as low speed of response and low displacement resolution. The platform is consist of flexible hinges which provide elastic supporting, and with piezoelectric actuators as its drives which has high stiffness, high speed of dynamic response, high kinematic accuracy and high resolution. The end effector of the platform come to spatial ultraprecise positioning after it drived by the compliant parallel links which drived by piezoelectric actuators. The finite element analysis shows it can reach to positioning accuracy in nanoscale.
ultra-precise positioning platform flexure hinge compliant mechanism finite element analysis
Chen Qiang Huang Yong Znu Dachang Zhou Mugui
College of Mechanical and Electrical Control Engineering Jiangxi University of Science and Technolog College of Mechanical and Electrical Control Engineering Jiangxi University of Science and Technolog
国际会议
厦门
英文
122-126
2010-10-29（万方平台首次上网日期，不代表论文的发表时间）