High Current and High Intensity Ion Beam Sources and Their Technological Applications
High-current ion beams have become a powerful tool for improving the surface properties of different materials. The prospects of wide commercial use of such beams for material treatment is not only due to the possibility of improving their properties, but, also for economic expediency. To achieve a high throughput and reduce the cost on ion beam material treatment, ion beams of high average and pulsed power are necessary. This paper gives an overview of work on generation of pulsed and repetitively pulsed beams of accelerated ions with currents ranging from fractions of an ampere to several tens of kA and with pulse duration from several tens of nanoseconds to several hundreds of microseconds. A number of different methods of materials surface properties modification using high power and intense ion beam and plasma are considered.
high current and intense ion beams plasma modification of materials coating deposition microparticle evaporation
A.I.Ryabchikov
National Research Tomsk Polytechnic University, Lenina ave.2, bdg.4, Tomsk, Russia
国际会议
北京
英文
185-189
2010-10-25（万方平台首次上网日期，不代表论文的发表时间）