Study on Design and Fabrication of Micro Thermal Control Louvers

摘要：

A micro thermal control device with polyimide based micro louver was proposed. The device structure was designed, the actuation voltage was analyzed theoretically and fabrication process was described. The micro louver prototype was fabricated using UV laser micromachining, electrochemistry etch and magnetron sputtering deposition technologies. The main parameters were tested and results were presented.

关键词： micro louvers micromachining thermal control

作者: S.Z.Cao X.K.Chen G.Wu J.P.Yang R.Wang L.X.Wang K.W.Shang

作者单位: Science and Technology on Surface Engineering Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China

会议类型: 国际会议

会议名称: The 3rd International Conference on Power Beam Processing Technologies(2010 高能束流加工技术国际会议 ICPBPT 2010)

会议地点: 北京

会议语种:英文

页码: 298-300

在线出版日期: 2010-10-25（万方平台首次上网日期，不代表论文的发表时间）