Design of Component Simulation Platform for Integrated Circuit Manufacturing Equipments
Simulation plays an important role in researching, developing and testing Integrated Circuit (IC) manufacturing equipments. It is possible to test most of the functions and performance on simulation platform, and simulation platform can be used to verify the consistency of the process and the reliability of IC manufacturing equipment at the same time. In order to achieve a class of general and configurable simulation platform, which is based on SEMI standard. This paper describes component simulation platform framwork and design methodology. Equipment maintenance time could be reduced and equipment utilization could be maximized with this simulation system. As a case study, the gas deliver subsystem test simulation is investigated on the designed component simulation platform, the simulation results show that the component silulation platform is helpful for rapid installation of IC equipment and verify its functions due to the automotic configuration of the component simulation middleware.
IC manufacturing equipment SEMI standard pressure subsystem
Wei Wane Bo Li Hua Xu Lei Li Peifa Jia Loneainp Zou
College of Electronics Engineering, Chongqing University of Posts and Telecomminucations, Chongqing, College of Electronics Engineering, Chongqing University of Posts and Telecomminucations, Chongqing, State Key Laboratory of Intelligent Technology and Systems,Tsinghua National Laboratory for Informat
国际会议
太原
英文
104-112
2010-10-22（万方平台首次上网日期，不代表论文的发表时间）