Development of MEMS Component Library with Modelica
For rapid modeling and simulation of MEMS, a MEMS component library consisting of beam, anchor, plate and gap is developed with Modelica. The hierarchy structure of this library are proposed. In order to show micro components structure, pin definitions, parameters and behaviors of mechanical beam are analyzed and then the lumped parameter beam is modeled based on object-oriented method with Modelica. Simulation results of a cantilever beam show accordance with FEA simulations, which indicates that this model can achieve precision, efficiency, reusability and extensibility.
MEMS library beam modelica model object- oriented
Wei Hu Xin Wei Xiaozhu Xie
School of Mechanical and Electronical Engineering Guangdong University of Technology Guangzhou, Guangdong, 510006, China
国际会议
太原
英文
1-5
2010-10-22（万方平台首次上网日期，不代表论文的发表时间）