Disturbance Elimination of Ultra-precision Micro-motion Platform by Adaptive Inverse Approach

摘要：

The low-frequency disturbance from the ground vibration has a significant effect on the accuracy of ultra-precision micro-positioning movement. To suppress the disturbance, this paper presents a disturbance cancellation scheme in which the adaptive inverse and the PID control are combined together. For the unstable system, the PID controller is used to stabilize the plant and to estimate the effect at the output of low frequency disturbances. Compensation signal is then introduced at input end by using adaptive inverse controller to eliminate the its effect. Simulation and experimental results show that the method can effectively suppress the low-frequency disturbance and significantly improve the steady-state tracking accuracy of the ultra-precision stage.

关键词： low-frequency disturbance elimination PID controller adaptive inverse control

作者: Haitao Liu Jinchun Hu Yu Zhu Kaiming Yang

作者单位: Department of Computer Science and Technology Tsinghua University Beijing, 100084, P.R.China Shijiaz Department of Precision Instruments and Mechanology Tsinghua University Beijing, 100084, P.R.China

会议类型: 国际会议

会议名称: The 2010 International Conference on Computer Application and System Modeling(2010计算机应用与系统建模国际会议 ICCASM 2010)

会议地点: 太原

会议语种:英文

页码: 178-182

在线出版日期: 2010-10-22（万方平台首次上网日期，不代表论文的发表时间）