A Scheduling Method in Semiconductor Manufacturing Lines Based on Genetic Algorithm and Simulated Annealing Algorithm

摘要：

Semiconductor manufacturing is one of the most complex manufacturing process. And job scheduling is a major problem in the semiconductor operation. A method of job scheduling in semiconductor manufacturing lines is proposed based on genetic algorithm and simulated annealing algorithm. Firstly each job is given a set of machine processing set* based on genetic algorithm, then the processing sequence of each machine can be arranged based on simulated annealing. This paper presents the reason and the solution in detail. The Minifab model is solved by the method and the result proves that this method is effective.

关键词： semiconductor manufacturing workpiece scheduling minifab model genetic algorithm simulated annealing algorithm

作者: TANG Chun-hui Qian Yu-Liang Zhu Jun Yan Shu-jia

作者单位: School of Optical-electrical and Computer Engineering,University of Shanghai for Science & Technolog College of Electronics and Information Engineering Tongji University Shanghai,China

会议类型: 国际会议

会议名称: 2010 International Conference on Information,Networking and Automation(2010 IEEE信息网络与自动化国际会议 ICINA 2010)

会议地点: 昆明

会议语种:英文

页码: 429-432

在线出版日期: 2010-10-17（万方平台首次上网日期，不代表论文的发表时间）