Microstructure and Mechanical Properties of Nitrogen Flux Alternating AlTiN Composite Multilayer Coatings

摘要：

The AlTiN composition multilayer coatings were deposited on high speed steel substrates with a medium-frequency (MF) reactive magnetron sputtering system using TiAl targets. During deposition of AlTiN multilayer coatings nitrogen flux was alternated in different periods. X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM), and high-resolution transmission electron microscopy ( HRTEM) were used to investigate the microstructure of AlTiN composition multilayer coatings. Their mechanical behaviors and adhesion properties were investigated using nano-indenter and scratch test The result indicated that the presently deposited multilayer thin films consisted of alternating AlTiN with different nitrogen contents in different layer thicknesses. In each layer, AlTiN exhibited nanocomposites of nanocrystallites embedded into amorphous matrices despite of their nitrogen content The difference between adjacent layers is that AlTiN layer with lower nitrogen content has a lower density of nanocrystallites. Formation of multilayer structure greatly increased the critical load at which film-substrate interface delamination occurs and adhesion energy although it only slightly increased both hardness and elastic modulus values, which indicates that formation of multilayer structure is beneficial for improvement of adhesion. Increase of nitrogen flux enhanced this effect

关键词： MF-reactive sputtering multilayer coating AlTiN microstructure hardness adhesion

作者: Luo Qinghong Lu Yonghao Lou Yanzhi Zhao Zhengye Yang huisheng

作者单位: 3rd Laboratory, Beijing Institute of Aeronautical Materials, Beijing 100095, China Department of Materials Physics, University of Science and Technology Beijing, Beijing 100083, China 4rd Laboratory, Beijing Institute of Aeronautical Materials, Beijing 100095, China

会议类型: 国际会议

会议名称: 2010 Asia-Pacific International Symposium on Aerospace Technology(2010 亚太航空航天技术研讨会 APISAT 2010)

会议地点: 西安

会议语种:英文

页码: 769-772

在线出版日期: 2010-09-01（万方平台首次上网日期，不代表论文的发表时间）