The Improvement Study of Model for Humidity Sensor Based on Quartz Glass

摘要：

This paper analyzes the 20 percent Sn4+-doped titania films who were prepared on the quartz glass humidity sensor by complex impedance analysis,improves the equivalent circuit model whose circuit description code is R(C(R(RQ)).This equivalent circuit uses the constant phase angle element Q instead of the capacitance C in the second resistance-capacitance parallel entries,and its circuit description code is R(C(R (RQ))).The results show that the model is more reasonable,because the error is smaller when it is used to fit the impedance spectra of the sensor.The equivalent circuit is convenient for analyzing the diffusion information of the thin films because of the changes of the value of n.

关键词： Humidity sensor Equivalent circuit The Q element

作者: Dongmei Feng Bajin Li

作者单位: College of Information Engineering Inner Mongolia University of Technology Huhhot,China

会议类型: 国际会议

会议名称: The 2nd IEEE International Conference on Advanced Computer Control(第二届先进计算机控制国际会议 ICACC 2010)

会议地点: 沈阳

会议语种:英文

页码: 361-364

在线出版日期: 2010-03-27（万方平台首次上网日期，不代表论文的发表时间）