A Microfabricated ICP Source and its Application in Miniaturization of Spectrometer

摘要：

A novel microfabricated inductively coupled plasma (ICP) source is introduced, which is an atomic emission spectrum excitation source. Its radio frequency power loss, size and Argon consumption are far less than one percent of atmospheric pressure ICP source. The micro ICP source is based on MEMS technology, its working gas is Argon at 100Pa. The configuration and characteristics of the micro ICP source are described. The application of the source in spectrometers is illustrated, it is intended to be used in conjunction with a planar miniature FabryPerot spectrometer to form a micro gas analyzer. A micro ICP source developed by author is introduced briefly, which work at 13.56MHz. At last, with the development of MEMS technology, the potential application areas of micro gas analyzer is presented.

关键词： MEMS microfabricated ICP source miniature Fabry-Perot spectrometer micro gas analyzer

作者: Yongni Pu Chao Yin

作者单位: Department of Electronic and Information Engineering Langfang Teachers College Hebei langfang,China

会议类型: 国际会议

会议名称: The 2nd IEEE International Conference on Advanced Computer Control(第二届先进计算机控制国际会议 ICACC 2010)

会议地点: 沈阳

会议语种:英文

页码: 336-338

在线出版日期: 2010-03-27（万方平台首次上网日期，不代表论文的发表时间）