Modeling of a micropump membrane with electrostatic actuator

摘要：

As a kind of fluid delivering device, micropumps usually employ flexible structure such as flexible membrane to force fluid flowing. It is necessary to predict the motion of flexible structure so as to control the micropump performance. In this paper, the principle of micropump using an electrostatic actuator has been introduced. According to the thin plate elastic theory, the bending motion of electrostatic-flexible membrane has been modelled. Based on Rayleith-Ritz method, the solution for harmonic vibration of flexible membrane has been derived. A calculation example of resonance frequency of silicon electrostatic actuating membrane has been carried out. And the result calculated from such model agree with that by means of finite element method. It indicats that the analyzation model is appropriate and applicable. All analyzations provide theoretical foundation for the controlling of MEMS actuators.

关键词： modeling flexible membrane electrostatic actuator thin elastic plate theory Rayleigh-Ritz method

作者: Liwei Li Rong Zhu Zhaoying Zhou Jianxing Ren

作者单位: School of Energy Sources and Environment Engineering,Shanghai University of Electric Power,Shanghai Dept.of Precision Instruments and Mechanology,Tsinghua University,Beijing,China

会议类型: 国际会议

会议名称: The 2nd IEEE International Conference on Advanced Computer Control(第二届先进计算机控制国际会议 ICACC 2010)

会议地点: 沈阳

会议语种:英文

页码: 630-632

在线出版日期: 2010-03-27（万方平台首次上网日期，不代表论文的发表时间）