A Differential Capacitive Accelerometer with Four Folded Springs and Changeable Area

摘要：

A differential capacitive accelerometer with four folded springs and changeable area was designed and fabricated. It was composed of upper electrode(proof mass), four folded springs、lower comb electrode. Modal and statics were analyzed by ANSYS, accelerometer was fabricated by bond and ICP etching technology. Detection circuit was fabricated and the test was completed. The maximum measured acceleration is 12g, sensitivity is 86mV/g, and precision is higher than ±4.5％.

关键词： changeable area folded springs accelerometer

作者: Wei Dong Jingran Zhou Wenbin Guo Xindong Zhang Caixia Liu Liang Shen Shengping Ruan WeiyouChen

作者单位: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering,Ji State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, J

会议类型: 国际会议

会议名称: 2011 International Conference on Information System and Computational Intelligence(2011 IEEE信息系统与计算智能国际会议 ICISCI 2011)

会议地点: 哈尔滨

会议语种:英文

页码: 165-167

在线出版日期: 2011-01-18（万方平台首次上网日期，不代表论文的发表时间）