A CMOS Interface ASIC for Micro-Accelerometer
This paper presents a CMOS interface ASIC for a capacitive acceleration sensing system. The Capacitive sensor interface is composed of a frontend programmable Switched Capacitor (SC) charge amplifier which converts the acceleration signal to voltage, and a back-end first-order SC Sigma-delta (Σ△)modulator. Two stages of correlated-double-sampling (CDS) scheme were used in the charge amplifier to cut down the low frequency noise from the readout electronic circuit and the parasitic capacitance of MEMS sensor. This architecture decouples the MEMS sensor from the optimized-performance Σ△ modulator. The top-down methodology has been followed for the design of the ASIC. This work is designed and implemented in a 0.35um CMOS technology with 3.3V supply voltage. Simulation results show sensitivity of 0.5V/g is achieved in the range of — Ig with a 1MHz sampling frequency.
SC CDS, MEMS, Accelerometer Sigma-delta Capacitance sensor interface circuit
Kang Xiaofei Quan Haiyang
Beijing Microelectronics Technology Institute (BMTI) No.2.Siyingmen N.Rd Donggaodi Fengtai District, Beijing, China, 100076
国际会议
2011 International Conference on Information and Industrial Electronics(2011年信息与工业电子国际会议 ICIIE 2011)
成都
英文
553-556
2011-01-14（万方平台首次上网日期，不代表论文的发表时间）