INVESTIGATION AND APPLICATION IN THE MECHANICAL EFFECT OF MICROCANTILEVER
Microcantilever is the simplest MEMS device. Based on investigating the mechanical effect of microcantilever, the new devices and the applications have been developed in two fields: (1) Chip of infrared imaging system - focal plane array (FPA), constructing uncooled infrared imaging system. A novel substrate-free FPA is proposed. The theoretical analysis and experiments demonstrate that the infrared absorptivity and the system responsivity of the novel FPA can respectively increase 60％ and one order of magnitude. (2) Microcantilever biosensor,used for detecting many kinds of trace substances,such as growth-promoting agent, broad spectrum antibiotic, heavy metal ion. The influence of the liquid refractive index change was studied and the restrain method was suggested.
microcantilever uncooled infrared optical method biosensor
Qingchuan Zhang Xiaoping Wu
Key Laboratory of Mechanical Behavior and Design of Materials of Chinese Academy of Sciences, University of Science and Technology of China, Hefei 230027 China
国际会议
广州
英文
38-44
2010-12-17（万方平台首次上网日期，不代表论文的发表时间）