Copper Indium Silicon nanocomposite thin film deposited by magnetron co-sputtering

摘要：

Thin CuInSi nanocomposite films were prepared by magnetron co-sputtering. The structures of CuInSi nanocomposite films were detected by X-ray diffraction(XRD); XRD studies of the annealed films indicate the presence of CuInSi, a peak at about 20=42.400°. The morphology of the film surface was studied by SEM. The nanocrystallization with needle shape of CuInSi could be seen clearly. The grain size is a few hundred angstroms.

关键词： magnetron co-sputtering CuInSi film nanocomposite

作者: Jiansheng Xie Jinhua Li, Ping Luan

作者单位: School of Mathematics and Physics, Changzhou University, Changzhou 213164, Jiangsu, China

会议类型: 国际会议

会议名称: 2010 International Conference on Nano Science and Technology(2010年IEEE纳米科技国际会议 ICNST2010)

会议地点: 成都

会议语种:英文

页码: 58-60

在线出版日期: 2010-12-17（万方平台首次上网日期，不代表论文的发表时间）