A Design of Thermo-Electrostatic Actuated Microelectromechanical Switch with Low Voltage and Fabrication Efforts
Requirement of voltage up-converters due to high pull-in voltage is one of the main problems by merely electrostatic actuated Microelectromechanical systembased switches. Thermally actuated switches are another alternatives but with very high power dissipation. In this paper a low voltage switch is demonstrated, which uses a combined thermoelectrostatic actuator. The switch can be integrated with standard CMOS circuits without any upconverters. Thermally power dissipation for the switch is lower than just thermal actuators. The switching time is about 70us and the maximal temperature of thermal actuator is lower than 150°C which cannot cause any longtime damage. Isolation and Insertion Loss quantities have been calculated to -25dB and -0.65dB at 20GHz from HFSS results respectively.
RF MEMS switch Thermo-electrostatic actuation CMOS up converter Pull in voltage
Parisa Mahmoudi Ashkan Mahmoudi Esmaeil Najafiaghdam
Department of Electrical Engineering Sahand University of Technology, Tabriz, Iran Department of Electrical Engineering Sahand University of Technology, Tabriz, Iran
国际会议
2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)
长沙
英文
38-41
2010-12-14（万方平台首次上网日期，不代表论文的发表时间）