Design of Digital Micromachined Thermal Gas Gyroscope

摘要：

Embedding microcontroller into sensor in order to make it smart has become one of development trends of sensor, especially for MEMS sensor. In this paper, the way of embedding microcontroller into sensor to design the digital micromachined thermal gas gyroscope (DMTGG) is discussed. The scheme of micromachined thermal gas gyroscope (MTGG) is introduced first, basing on it, the design of DMTGG is proposed. The design of digital drive module for MTGG, the design of signal detection of MTGG based on digital phase sensitive detector, and the design of embedded microcontroller system are introduced. The designed DMTGG has been tested by experiments. The measurement results of DMTGG show a system scale factor of 4.119mV/(°/s) ,a non-linearity of 0.38％, a dissymmetry of 0.19％, a zero-bias stability of 1.05 °/s and a noise density of 0.95 °/s/Hz~(-1/2).

关键词： micromachined thermal gas gyroscope digital drive signal detect digital phase sensitive detector(DPSD)

作者: Hongjie Chu Xinhua Zhu Yan Su

作者单位: MEMS Inertial Technology Research Center Nanjing University of Science and Technology Nanjing, China MEMS Inertial Technology Research Center Nanjing University of Science and Technology Nanjing,,China

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 45-49

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）