A Theoretical and Experimental Study on Temperature Dependent Characteristics of Silicon MEMS Gyroscope Drive Mode

摘要：

The prototype of the silicon micro gyroscope is introduced. Temperature is the key factor that affects the performance of the gyroscope. In this paper, temperature dependent characteristics of silicon micro gyroscope drive mode is analyzed. The theoretical results show that temperature coefficient of the Youngs modulus is the most critical factor that affects temperature characteristics of the silicon micro gyroscopes drive modal frequency and the frequency is proportional to the temperature. The results are verified by finite element simulations. The silicon micro gyroscopes are experimented in a high accurate thermostat The drive modal frequency and temperature are measured and sampled. These experimental results show that the temperature coefficient of Youngs modulus is the key factor and the frequency is proportional to the temperature. The theoretic analyses are also validated by the experiments.

关键词： silicon micro gyroscope drive modal frequency temperature characteristics

作者: Feng Rui Qiu An-ping Shi Qin Su Yan

作者单位: School of Mechanical Engineering Nanjing University of Science and Technology Nanjing, China

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 50-54

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）